3D-Roughness Reconstruction

With the 3D Roughness Reconstruction application, the Phenom pro series systems are able to generate three-dimensional images and submicrometer roughness measurements. This fully automated application for the Phenom G2 pro SEM helps to communicate imaging results and will extract and visualize data normally hidden within a sample.

3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users. It is often difficult, for example, to identify dents, scratches and burrs from flat 2D images. Measuring the average roughness (Ra) and the roughness height (Rz) is critical for controlling and understanding production processes. By using SEM imaging for data collection, a much better resolution can be achieved than by using traditional (indirect) methods.