Phenom Pro Desktop SEM
The Phenom Pro Generation 5 is the high-end imaging desktop scanning electron microscope (SEM). Its unique design makes it suitable for use in a wide variety of applications and markets. With custom made detection hardware, a high brightness source and a state of the art color navigation camera, it is an extremely powerful desktop SEM.
Compared to its predecessor, the Phenom Pro Generation 5 has a 20% better resolution and an even better user experience. Users are enabled to address a wider range of applications, including samples sensitive to electron beam irradiation.
The zoom functionality of the color navigation camera narrows the gap between optical and SEM imaging. The Phenom Pro can be upgraded to Phenom ProX with EDS or equipped with the Phenom ProSuite application platform. Also, an optional SE detector is available.
Specifications
Phenom Pro Desktop SEM

Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
Vacuum modes
- High vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Sample height
Phenom Pharos Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Sample height
Phenom XL Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height