Phenom Pro Desktop SEM
The Phenom Pro Generation 5 is the high-end imaging desktop scanning electron microscope (SEM). Its unique design makes it suitable for use in a wide variety of applications and markets. With custom made detection hardware, a high brightness source and a state of the art color navigation camera, it is an extremely powerful desktop SEM.
Compared to its predecessor, the Phenom Pro Generation 5 has a 20% better resolution and an even better user experience. Users are enabled to address a wider range of applications, including samples sensitive to electron beam irradiation.
The zoom functionality of the color navigation camera narrows the gap between optical and SEM imaging. The Phenom Pro can be upgraded to Phenom ProX with EDS or equipped with the Phenom ProSuite application platform. Also, an optional SE detector is available.
Specifications
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
Vacuum modes
Detector
Sample size
Sample height
Phenom Pro Desktop SEM
Light optical magnification
20–134x
Electron optical magnification range
80–150,000x
Resolution
≤ 8 nm SED and ≤ 10 nm BSD
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
Vacuum modes
- High vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Up to 32 mm diameter
Sample height
Up to 100 mm
Phenom Pharos Desktop SEM
Light optical magnification
20–134x
Electron optical magnification range
200–1,000,000x
Resolution
2.5 nm SED and 4 nm BSD
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Up to 32 mm diameter
Sample height
Up to 100 mm
Phenom XL Desktop SEM
Light optical magnification
3–16x
Electron optical magnification range
80–100,000x
Resolution
≤ 14 nm
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Max. 65 mm
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Case Studies
Scientist at DSM Ahead 
Dr. Arnaud Chiche
Principal Scientist Johnson & Johnson Pharmaceutical R&D 
Ph.D. Arjen P. Tinke
Managing Director Synapse 
Bas de Laat
Faculty of Textile Engineering, Technical University of Liberec 
Jitka Färberová
Senior Scientist, Newport Corporation 
Dr. Tommaso Baldacchini
Microbiologist at the department of Medical Microbiology, University Medical Center Utrecht 
Dr. ing. Antoni P.A. Hendrickx
Gallery
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