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Phenom ProX

The Phenom ProX scanning electron microscope (SEM) is based on the 5th generation Phenom desktop SEM platform and is a high-performance SEM for imaging and analysis. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Besides point analysis, the optional Elemental Mapping and Line Scan software allows further analysis of the distribution of elements.

The Phenom SEM microscopes are intuitive to use, fast to create results and built to high-quality standards. These core principles have been used to develop and create the Phenom ProX spectroscopy system for best-in-class imaging and analysis.
Compared to its predecessors, the Generation 5 Phenom ProX SEM has at least a 20% better resolution, and an even better user experience to address a wider range of applications, including samples that are very sensitive to beam damage. Fast identification of different chemical elements in a specimen is accomplished with the Element Identification (EID) software package and a specially designed and fully integrated Energy Dispersive Spectrometer (EDS).

Download specification sheet

Specifications

Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
Vacuum modes
Detector
Sample size
Sample height
 

Phenom ProX

Phenom ProX

Light optical magnification

20 - 135x

Electron optical magnification range

80 - 150,000x

Resolution

< 10 nm (BSED) & < 8 nm (SED)

Digital zoom

Max 12x

Light optical navigation camera

Color

Acceleration voltages

  • Default: 5 kV, 10 kV and 15 kV
  • Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode

Vacuum modes

  • Standard mode
  • Charge reduction mode

Detector

  • BSD
  • EDS
  • SED (optional)

Sample size

Up to 32 mm (Ø)

Sample height

Up to 100 mm (h)

Phenom XL

Light optical magnification

3 - 16x

Electron optical magnification range

80 - 100,000x

Resolution

< 14 nm

Digital zoom

Max. 12x

Light optical navigation camera

Color

Acceleration voltages

  • Default: 5 kV, 10 kV and 15 kV
  • Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector

Vacuum modes

  • Standard mode
  • Charge reduction mode
  • High vacuum mode

Detector

  • BSD
  • EDS (optional)
  • SED (optional)

Sample size

  • Max. 100 mm x 100 mm
  • Up to 36 x 12 mm pin stubs

Sample height

Max. 65 mm

Phenom Pro

Light optical magnification

20 - 135x

Electron optical magnification range

80 - 150,000x

Resolution

< 10 nm (BSED) & < 8 nm (SED)

Digital zoom

Max. 12x

Light optical navigation camera

Color

Acceleration voltages

  • Default: 5 kV, 10 kV and 15 kV

Vacuum modes

  • Standard mode
  • Charge reduction mode

Detector

  • BSD
  • EDS (optional)
  • SED (optional)

Sample size

Up to 32 mm (Ø)

Sample height

Up to 100 mm (h)

Case Studies

Scientist at DSM Ahead

Dr. Arnaud Chiche

"The Phenom was bought initially to support the nano-fibers project, but today is used for several projects in multiple fields. This has proven to be very..."

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Managing Director Synapse

Bas de Laat

"Until recently we viewed a drop of blood under an optical microscope. It took three days to fully analyse. Now we put the sample under the SEM and are ready."

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Faculty of Textile Engineering, Technical University of Liberec

Jitka Färberová

"The purchase of the Phenom desktop scanning electron microscope has improved our workflow and research programs. Whereas in the past, we had to wait an ..."

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Technology Manager

Luuk Berkelaar

It was the resolution and magnification that were the most important features for us. In addition, using the elemental analysis we can determine ...

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Ph.D Assistant Professor Institute for Molecular Science, National Institutes of Natural Sciences Japan

Shiro Yoshioka

"The speed of Phenom ProX and user-friendly ParticleMetric software will provide great advantages for researchers investigating microorganisms."

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Section Head Analysis Technology, Kunststoff-Institut Lüdenscheid

Dr. Andreas Balster

This case study explains how the Phenom ProX allows researchers to investigate various plastic materials without extensive sample preparations.

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Process Engineer, Mosa

Berry Veltman

"Thanks to Phenom, we have been able to conduct analyses in greater detail and identify increased concentrations of carbon or iron with similar nodular defects"

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President of Graphite Machining Services & Innovations, LLC

Peter Guercio

"Our recent product release came to market 8x faster than before, thanks to the real time data acquisition and elemental analysis of the Phenom ProX with EDS."

Read more

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